2020
The Outstanding Achievement Award
Masao Tomikawa,
Toray Industries, Inc.
The Best Paper Award
Yukinori Yamauchi1, Naoki Doi2, Shin-ichi Kondo2, Yasushi Sasai2, and Masayuki Kuzuya3
1. Matsuyama University
2. Gifu Pharmaceutical University
3. Chubu Gakuin University, Japan
The Best Paper Award
Kevin Wylie, Yuta Nabae, and Teruaki Hayakawa
Tokyo Institute of Technology, Japan
2019
The Outstanding Achievement Award
Robert D. Allen,
IBM Research, Almaden
The Best Paper Award
Hiroaki Takehara, Yukihiro Kanda, and Takanori Ichiki
The University of Tokyo, Japan
The Best Paper Award
Satoshi Takei, Makoto Hanabata, Kento Mizui, Kazuho Kurematsu, and Shinya Nakajima
Toyama Prefectural University, Japan
2018
The Outstanding Achievement Award
Susumu Fujimori,
Tokyo University of Science
The Best Paper Award
Yusuf Yagci, Gorkem Yilmaz, and Mustafa Ciftci
Istanbul Technical University, Republic of Turkey
The Best Paper Award
Chen-Gang Wang, Feifei Li, and Atsushi Goto
Nanyang Technological University, Singapore
2017
The Outstanding Achievement Award
Paul F. Nealey,
The University of Chicago
The Best Paper Award
Kenji Yoshimoto1),2), Akihisa Yoshida2), Masahiro Ohshima3), Takashi Taniguchi3), Katsuyoshi Kodera3), Yoshihiro Naka3), Hideki Kanai3), Sachiko Kobayashi3), Simon Maeda3), Phubes Jiravanichsakul3), Katsutoshi Kobayashi3), and Hisako Aoyama3)
1. Center for the Promotion of Interdisciplinary Education and Research, Kyoto University
2. Department of Chemical Engineering, Graduate School of Engineering, Kyoto University
3. Toshiba Corporation
The Best Paper Award
Kyohei Nakano, Yujiao Chen, Kaori Suzuki and Keisuke Tajima
The Center for Emergent Matter Science (CEMS), RIKEN
2016
The Outstanding Achievement Award
Takumi Ueno,
Shinshu University
The Best Paper Award
Tatsuhiko Yajima, Wenfeng Hai, Tei Hi, and Keita Shimizu,
Saitama Institute of Technology
The Best Paper Award
Hiroki Takano1), Lei Wang1), Yuki Tanaka1), Rina Maeda1), Naoko Kihara2), Yuriko Seino2), Hironobu Sato2), Yoshiaki
Kawamonzen2), Ken Miyagi2), Shinya Minegishi2), Tsukasa Azuma2), Christopher K. Ober3), and Teruaki Hayakawa1)
1. Tokyo Institute of Technology,
2. EUVL Infrastructure Development Center, Inc,
3. Cornell University
2015
The Outstanding Achievement Award
Christopher K. Ober,
Cornell University
The Best Paper Award
Dustin W. Janes1), Takejiro Inoue2),3), Bradley D. McCoy1), Ishita Madan1), Paul F. Nealey2),
C. Grant Willson1) and Christopher J. Ellison1),
1. The University of Texas,
2. The University of Chicago,
3. Toray Industries
The Best Paper Award
Shinji Matsui1),5), Hiroshi Hiroshima2),5), Yoshihiko Hirai3),5), and Masaru Nakagawa4),5)
1. University of Hyogo,
2. National Institute of Advanced Industrial Science and Technology (AIST),
3. Osaka Prefecture University,
4. Tohoku University,
5. JST-CREST
2014
The Outstanding Achievement Award
Hiroo Kinoshita
University of Hyogo
The Best paper Award
Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu, Hironobu Sato, Masahiro Kanno, Katsutoshi
Kobayashi, Ayako Kawanishi, Tsubasa Imamura, Mitsuhiro Omura, Naofumi Nakamura,
Tsukasa Azuma
Toshiba Corporation
2013
The Outstanding Achievement Award
Murrae J. Bowden
Stevens Institute of Technology
The Best paper Award
Shingo Ueno1),2), Aiko Ono1),2), Ryo Kobayashi1),2), Yoko Tanaka1),2), Shunsuke Sato1),2), Manish Biyani1),2), Naoto Nemoto1),3), and Takanori Ichiki1),2)
1. The University of Tokyo
2. JST-CREST
3. Saitama University
The Best Paper Award
Atsushi Asano1), Yuta Maeyoshi1), Katsuyoshi Takano1), Masaaki Omichi1), Masaki Sugimoto2), Masahito Yoshikawa2), Satoshi Tsukuda3), Shun-ichiro Tanaka3), Akinori Saeki1), and Shu Seki1)
1. Osaka University
2. Japan Atomic Energy Agency
3. Thoku University
2012
The Outstanding Achievement Award
Mitsuru Ueda
Tokyo Institute of Technology
The Best paper Award
Haruyuki Okamura and Masamitsu Shirai
Osaka Prefecture University
The Best Paper Award
Masuhiro Kogoma, Kazuo Takahashi and Kunihito Tanaka
Sophia University
2011
The Outstanding Achievement Award
Rallph R. Dammel
AZ Electronic Materials Corporation
The Best Paper Award
Toshiro Itani and Julius Joseph Santillan
Semiconductor Leading Edge Technologies
The Best Paper Award
Yoshihiko Hirai
Osaka Prefecture University
2010
The Outstanding Achievement Award
Koji Nozaki
Fujitsu Laboratories
The Best Paper Award
Hiroshi Hiroshima and Hidemasa Atobe
Advanced Institute of Science and Technology
The Best Paper Award
Tatsuyuki Nakatani1), Yuki Nitta1), Keishi Okamoto1), and Akira Mochizuki2)
1. Toyo Advanced Technologies
2. Tokai University
2009
The Outstanding Achievement Award
James V. Crivello
Rensselaer Polytechnic Institute
The Best Paper Award
Dario L. Goldfarb1), Libor Vyklicky1), Sean D. Burns1), Karen Petrillo2), John Arnold2), Anthony Lisi2), Dirk Pfeiffer1), Daniel P. Sanders3), Robert D. Allen3), David R. Medeiros2), Dah Chung Owe-Yang4), Kazumi Noda5), Seiichiro Tachibana5), and Shozo Shirai5)
1. IBM T.J. Watson Research Center
2. IBM Systems & Technology Group
3. IBM Almaden Research Center
4. Shin-Etsu MicroSi, Inc.
5. Shin-Etsu Chemical Co.
The Best Paper Award
Kunihiko Okano, Yasuyuki Mikami, Hirobumi Shibata and Takashi Yamashita
Tokyo University of Science
2008
The Outstanding Achievement Award
Masao Kato
Tokyo University of Science
The Best Paper Award
Tomotaka Tsuchimura, Kazuto Shimada, Youhei Ishiji, Tetsunori Matshushita and Toshiaki Aoai
Fuji Film
The Best Paper Award
Hiromi Yatsuda1), Makoto Nara1), Toshimasa Mori1), Kazuto Tershima2), Hidenobu Aizawa3), and Shigeru Kurosawa3)
1. Radio Japan
2. Tokyo University
3. Advanced Institute of Science and Technology
2007
The Outstanding Achievement Award
Hiroshi Ito
IBM
The Best Paper Award
Makiko Irie, Kotaro Endo, Takeshi Iwai
Tokyo Ohka
2006
The Outstanding Achievement Award
Masahiro Tsunooka
Osaka Prefecture University
The Best Paper Award
Mireille Maenhoudt, Geert Vandenberghe, Monique Ercken, Shaunee Cheng, Peter Leunissen and Kurt Ronse
IMEC
2005
The Outstanding Achievement Award
Roland Rubner
University of Erlangen-Numremberg
The Best Paper Award
Akira Kawai, Takayoshi Niiyama, Masahito Hirano, Makoto Sakata and Atsushi Ishikawa
Nagaoka Institute of Technology
The Best Paper Award
Sinzo Morita and Md. Abul Kashem
Nagoya University
2004
The Outstanding Achievement Award
Tsuguo Yamaoka
Chiba University
The Best Paper Award
Christopher K. Ober, Katsuji Douki, Young C. Bae, Junyan Dai and Will Conley
Cornell University
2003
The Outstanding Achievement Award
C. Grant Willson
University of Texas at Austin
The Best Paper Award
Tsuyohiko Fujigaya, Yuji Shibasaki, Shinji Ando and Mitsuru Ueda
Tokyo Institute of Technology
The Best Paper Award
Kentarou Tamaki, Tomohiko Utaka, Hideki Takase, Yuichi Eriyama and Takashi Ukachi
JSR
2002
Masamitsu Shirai, Toyofumi Shinozuka, Haruyuki Okamura, Masahiro Tsunooka, Shinji Kishimura, Masayuki Endo and Masaru Sasago
Osaka Prefecture University, Panasonic
Hiroshi Ito, Gregory M. Wallraff, Nicolette Fender, Philli J. Brock, Hoa D. Truong, Gregory Breyta, Dolores C. Miller, Mark H. Sherwood and Robert D. Allen
IBM Almaden Research Center
Kohei Goto, Yasutake Inoue and Minoru Matsubara
JSR
2001
Hiroyuki Niino, Juergen Ihleman, Shigeyuki Ono and Akira Yabe
Advanced Institute of Science and Technology
Yoshiyuki Yokoyama, Takashi Hattori, Kaori Kimura, Toshihiko Tanaka and Hiroshi Shiraishi
Hitachi
2000
Yoshinori Hirano, Norimitsu Ohmori, Masayuki Hata and Minoru Tsuda
Chiba University
Takuya Naito, Takeshi Ohfuji, Masayuki Endo, Hiroaki Morimitsu, Koji Arimitsu and Kunihiro Ichimura
Selete, Tokyo Institute of Technology
Ferencz S. Denes, Sorin O. Manolache and Raymond A. Young
University of Wisconsin
1999
Shouichi Uchino, Jiro Yamamoto, Sonoko Migitaka, Kyoko Kojima,
Michiaki Hashimoto, Fumio Murai and Hiroshi Shiraishi
Hitachi
Norimitsu Tohnai, Yoshiaki Inaki, Mikiji Miyata, Nobuyuki Yasui,
Eiko Mochizuki and Yasushi Kaji
Osaka University
1998
Kaichiro Nakano, Katsumi Maeda, Shigeyuki Iwasa and Etsuo Hasegawa
NEC
Francis Houlihan, Thomas I. Wallow, Allen G. Timko, Eric Neria, Richard S. Hutte, Ray Cirelli, Janet M. Kometani, Omkaram Nalamasu and Elsa Reichmanis
Bell Laboratories
Jiro Nakamura, Hiroshi Ban and Akinobu Tanaka
NTT
1997
Sartoshi Takechi, Makoto Takahashi, Akiko Kotachi, Koji Nozaki and Isamu Hanyu
Fujitsu Laboratories
Masayuki Kuzuya, Masumi Sugito and Shinichi Kondo
Gifu Pharmaceutical University
Hiroshi Ito, Greg Breyta, Donald C. Hofer, R. Sooriyakumaran, Karen Petrillo and David Seager
IBM